300mm Probers

Leading-edge 300mm wafer production demands wafer probing that can address shrinking geometries and deliver extremely accurate, high-throughput for fine-pitch probing applications and advanced devices with copper interconnects and low-k dielectrics that require special handling. Designed with customers’ production challenges in mind, our 300mm wafer probers provide reliable, accurate, high-throughput production capability for real-world test environments.

Which system is right for you?

Fusion of advanced automation and prober technology

Volume 300mm production demands probing that packages reliability, accuracy, automation and throughput. The EG6000, responds to this challenge by providing the world’s fastest, most accurate and most reliable 300mm production probing solution.

EG6000 Key Benefits:

  • Precision direct-drive technology to attain the industry’s highest
    300mm probing accuracy.
  • The elimination of negative effects on test from external vibrations
    encountered in the production environment.
  • The fastest lot-start to lot-end throughput.
  • Low maintenance and high mean time between failures or adjustment.
  • Simplified set-up and operation through “one-button” probing and
    robust critical functions.
  • The ability to easily move the machine and resume testing operations
    without re-calibration.
  • Safe and accurate testing of sensitive Cu and low K dielectric devices

Fine-pitch probing for Parametric Test Structures

The demands of 300mm production require highly accurate parametric testing at increasingly lower current and voltage levels. The EG6000e is designed to answer this challenge, offering exceptional low electrical noise and fast settling for high-throughput measurements.

EG6000e Key Benefits

  • Extremely low system noise, electrical leakage and capacitance
  • Precision direct-drive technology to attain the industry’s highest
    300mm probing accuracy
  • Increased throughput with fast electrical settling
  • Active control of external vibration for consistent test results
  • Safe and accurate testing of sensitive Cu and low K dielectric devices
  • The ability to quickly test at different temperatures